Study on gray-scale masks manufacture with electrically addressed spatial light modulators

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 7 >Page 46 > Article

Opto-Electronic Engineering
Vol. 31, Issue 7, 46 (2004)

Study on gray-scale masks manufacture with electrically addressed spatial light modulators

[in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on gray-scale masks manufacture with electrically addressed spatial light modulators[J]. Opto-Electronic Engineering, 2004, 31(7): 46 Copy Citation Text

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References

[3] KEARNEY K J, NINKOV Z. Characterization of a digital micro mirror device for use as an optical mask in imaging and spectroscopy[J]. SPIE, 1998, 3292: 81-92.

[5] MELLIN S D. Design and analysis of finite aperture diffractive optical elements [D]. Huntsville: University of Alabama, 2001. 72-86.

[7] O'SHEA D C, ROCKWARD W S. Gray-scale masks for diffractive-optics fabrication: ‖. Spatially filtered halftone screens [J]. Applied Optics, 1995, 34 (32): 7518-7526.

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