• Chinese Journal of Lasers
  • Vol. 51, Issue 16, 1602410 (2024)
Jianfeng Yan1,*, Heng Guo1, Yuzhi Zhao1, Sumei Wang2, and Liangti Qu3
Author Affiliations
  • 1State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
  • 2School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
  • 3Department of Chemistry, Tsinghua University, Beijing 100084, China
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    DOI: 10.3788/CJL240868 Cite this Article Set citation alerts
    Jianfeng Yan, Heng Guo, Yuzhi Zhao, Sumei Wang, Liangti Qu. Progress in Laser Fabrication of Microsupercapacitors (Invited)[J]. Chinese Journal of Lasers, 2024, 51(16): 1602410 Copy Citation Text show less
    Performance characteristics and energy storage mechanism of supercapacitors. (a) Performance comparison of supercapacitors, Li-ion cells, and Na-ion cells[1]; (b) energy storage mechanism of electrical double-layer capacitor[2]; (c) energy storage mechanism of pseudocapacitor[2]
    Fig. 1. Performance characteristics and energy storage mechanism of supercapacitors. (a) Performance comparison of supercapacitors, Li-ion cells, and Na-ion cells[1]; (b) energy storage mechanism of electrical double-layer capacitor[2]; (c) energy storage mechanism of pseudocapacitor[2]
    Fabrication of supercapacitors by laser ablation method. (a) Fabrication of supercapacitor by laser ablation of graphene[34]; (b) fabrication of supercapacitors by combining laser ablation and electrochemical deposition[36]; (c) micro morphology of the asymmetric supercapacitor microelectrode[36]; (d) fabrication of three-dimensional (3D) supercapacitor by laser ablation of carbon nanofiber material[37]; (e) morphology of the 3D supercapacitor microelectrode[37]; (f) electrochemical performance of the 3D supercapacitor[37]
    Fig. 2. Fabrication of supercapacitors by laser ablation method. (a) Fabrication of supercapacitor by laser ablation of graphene[34]; (b) fabrication of supercapacitors by combining laser ablation and electrochemical deposition[36]; (c) micro morphology of the asymmetric supercapacitor microelectrode[36]; (d) fabrication of three-dimensional (3D) supercapacitor by laser ablation of carbon nanofiber material[37]; (e) morphology of the 3D supercapacitor microelectrode[37]; (f) electrochemical performance of the 3D supercapacitor[37]
    Fabrication of supercapacitor by laser reduction/carbonization. (a) Fabrication process of the supercapacitor by laser reduction of graphene oxide (GO)[59]; (b) schematic diagram of laser carbonizing PI to produce laser-induced graphene (LIG)[61]; (c) scanning electronic microscopy image of the LIG[61]; (d) image of the microelectrode processed with LIG[61]
    Fig. 3. Fabrication of supercapacitor by laser reduction/carbonization. (a) Fabrication process of the supercapacitor by laser reduction of graphene oxide (GO)[59]; (b) schematic diagram of laser carbonizing PI to produce laser-induced graphene (LIG)[61]; (c) scanning electronic microscopy image of the LIG[61]; (d) image of the microelectrode processed with LIG[61]
    Fabrication of supercapacitors by laser processing composite material. (a) Laser processing B-doped carbon electrode[80]; (b) morphology of B-doped carbon electrode[80]; (c) mechanism of laser processing Fe3O4/C composite material[81]; (d) laser-fabricated Fe3O4/C composite material flexible supercapacitor[81]
    Fig. 4. Fabrication of supercapacitors by laser processing composite material. (a) Laser processing B-doped carbon electrode[80]; (b) morphology of B-doped carbon electrode[80]; (c) mechanism of laser processing Fe3O4/C composite material[81]; (d) laser-fabricated Fe3O4/C composite material flexible supercapacitor[81]
    Fabrication of supercapacitor by laser synthesis of functional material. (a) Fabrication of supercapacitor by laser direct writing of metal carbide[92]; (b) laser scanning of MXene to produce porous morphology[93]; (c) laser synthesis of MXene/Fe3O4 composite material[94]; (d) morphology of the MXene/Fe3O4 composite material[94]
    Fig. 5. Fabrication of supercapacitor by laser synthesis of functional material. (a) Fabrication of supercapacitor by laser direct writing of metal carbide[92]; (b) laser scanning of MXene to produce porous morphology[93]; (c) laser synthesis of MXene/Fe3O4 composite material[94]; (d) morphology of the MXene/Fe3O4 composite material[94]
    Fabrication of supercapacitors by ultrafast laser ablation. (a) Fabrication of supercapacitor by ultrafast laser ablation of MXene film[100]; (b) optical microscopy image of the ultrafast laser-fabricated MXene supercapacitor[100]; (c) fabrication of supercapacitor by double-pulse femtosecond laser ablation of MXene film[103]; (d) microelectrode array processed by double-pulse femtosecond laser[103]; (e) morphology of microelectrode gap processed by double-pulse femtosecond laser[103]
    Fig. 6. Fabrication of supercapacitors by ultrafast laser ablation. (a) Fabrication of supercapacitor by ultrafast laser ablation of MXene film[100]; (b) optical microscopy image of the ultrafast laser-fabricated MXene supercapacitor[100]; (c) fabrication of supercapacitor by double-pulse femtosecond laser ablation of MXene film[103]; (d) microelectrode array processed by double-pulse femtosecond laser[103]; (e) morphology of microelectrode gap processed by double-pulse femtosecond laser[103]
    Fabrication of supercapacitor by ultrafast laser Bessel beam ablation[105]. (a) Fabrication process of supercapacitor by ultrafast laser Bessel beam; (b) optical field distribution of the Bessel beam; (c) morphology of the three micro electrodes with different gap widths processed by ultrafast laser; (d) electrochemical performances of the supercapacitor; (e) microelectrode array processed by ultrafast laser
    Fig. 7. Fabrication of supercapacitor by ultrafast laser Bessel beam ablation[105]. (a) Fabrication process of supercapacitor by ultrafast laser Bessel beam; (b) optical field distribution of the Bessel beam; (c) morphology of the three micro electrodes with different gap widths processed by ultrafast laser; (d) electrochemical performances of the supercapacitor; (e) microelectrode array processed by ultrafast laser
    Fabrication of supercapacitors by ultrafast laser-induced carbonization. (a) Processing of carbon electrode by combing ultrafast laser and alkali activation[108]; (b) supercapacitor fabricated by combining ultrafast laser and alkali activation[108]; (c) fabrication of supercapacitor by ultrafast laser carbonization of leaves[110-111]; (d)(e) morphology of the carbon electrode processed on a leaf by ultrafast laser carbonization[110-111]
    Fig. 8. Fabrication of supercapacitors by ultrafast laser-induced carbonization. (a) Processing of carbon electrode by combing ultrafast laser and alkali activation[108]; (b) supercapacitor fabricated by combining ultrafast laser and alkali activation[108]; (c) fabrication of supercapacitor by ultrafast laser carbonization of leaves[110-111]; (d)(e) morphology of the carbon electrode processed on a leaf by ultrafast laser carbonization[110-111]
    Fabrication of supercapacitor by ultrafast laser-induced in-situ carbonization[115]. (a) Schematic diagram of ultrafast laser-induced in-situ carbonization; (b) morphology comparison of the areas processed by laser direct carbonization and laser-induced in-situ carbonization; (c) line adjustability and patterning of the laser-induced in-situ carbonization; (d) fabrication process of the supercapacitor and the flexible electrodes; (e) size-adjustable electrodes and electrode array; (f) electrochemical performance of the carbonized supercapacitor
    Fig. 9. Fabrication of supercapacitor by ultrafast laser-induced in-situ carbonization[115]. (a) Schematic diagram of ultrafast laser-induced in-situ carbonization; (b) morphology comparison of the areas processed by laser direct carbonization and laser-induced in-situ carbonization; (c) line adjustability and patterning of the laser-induced in-situ carbonization; (d) fabrication process of the supercapacitor and the flexible electrodes; (e) size-adjustable electrodes and electrode array; (f) electrochemical performance of the carbonized supercapacitor
    Fabrication of supercapacitors by combining ultrafast laser processing and other technologies. (a) Fabrication of supercapacitor by combining ultrafast laser ablation and electrochemical oxidation[116]; (b) fabrication of supercapacitor by combining ultrafast laser reduction and quantum dot deposition[119]; (c) morphology of the ultrafast laser-prepared composite material[119]; (d) images of the transparent electrode processed by the ultrafast laser[119]
    Fig. 10. Fabrication of supercapacitors by combining ultrafast laser processing and other technologies. (a) Fabrication of supercapacitor by combining ultrafast laser ablation and electrochemical oxidation[116]; (b) fabrication of supercapacitor by combining ultrafast laser reduction and quantum dot deposition[119]; (c) morphology of the ultrafast laser-prepared composite material[119]; (d) images of the transparent electrode processed by the ultrafast laser[119]
    Fabrication of supercapacitor by precursor-assisted ultrafast laser carbonization[122]. (a) Schematic diagram of the precursor-assisted ultrafast laser carbonization method; (b) morphology and composition characteristics of the composite material electrode; (c) electrochemical performance of hybrid supercapacitors; (d) schematic diagram of the hybrid supercapacitor array; (e) electrochemical performance comparison of the hybrid supercapacitor and other supercapacitors
    Fig. 11. Fabrication of supercapacitor by precursor-assisted ultrafast laser carbonization[122]. (a) Schematic diagram of the precursor-assisted ultrafast laser carbonization method; (b) morphology and composition characteristics of the composite material electrode; (c) electrochemical performance of hybrid supercapacitors; (d) schematic diagram of the hybrid supercapacitor array; (e) electrochemical performance comparison of the hybrid supercapacitor and other supercapacitors
    Jianfeng Yan, Heng Guo, Yuzhi Zhao, Sumei Wang, Liangti Qu. Progress in Laser Fabrication of Microsupercapacitors (Invited)[J]. Chinese Journal of Lasers, 2024, 51(16): 1602410
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