Xing WANG, Mingwang MA, Ruiyun WAN, Lei WANG, Xiaohua TAN. Effect of substrate temperature on surface morphology and mechanical properties of Ti films[J]. NUCLEAR TECHNIQUES, 2023, 46(10): 100202
- NUCLEAR TECHNIQUES
- Vol. 46, Issue 10, 100202 (2023)
Fig. 1. XRD patterns (a) and texture coefficients (b) of Ti films at different substrate temperatures
Fig. 2. SEM images of Ti films at different substrate temperatures (a) 600 ℃, (b) 650 ℃, (c) 700 ℃, (d) 750 ℃
Fig. 3. AFM images of Ti films at different substrate temperatures (a) 600 ℃, (b) 650 ℃, (c) 700 ℃, (d) 750 ℃
Fig. 4. Grain size distribution of Ti films at different substrate temperatures (a) 600 ℃, (b) 650 ℃, (c) 700 ℃, (d) 750 ℃
Fig. 5. Average grain size and roughness of Ti films at different substrate temperatures
Fig. 6. Representative unloading curves of the AFM nanoindentation of Ti films at different substrate temperatures
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Table 1. Calculation results for elastic modulus of Ti films at different substrate temperatures
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