• Acta Photonica Sinica
  • Vol. 34, Issue 6, 877 (2005)
1 and 1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese]. Young′s Moduli Evaluation of Micro-machined Silicon Membranes Using Optically Excited Resonance and Optical Fiber Sensing Techniques[J]. Acta Photonica Sinica, 2005, 34(6): 877 Copy Citation Text show less
    References

    [1] Pereira S, Chak P, Sipe J E. Gap-soliton switching in short microresonator structures. Journal of the Optical Society of America B, 2002,19(9): 2191~2202

    [2] Pramanik C, Islam T, Saha H. Impact of self heating in a silicon MEMS piezo-resistive pressure sensor. Sensor Letters, 2004,2(2): 131~137

    [3] Baker M S, Howell L L. On-chip actuation of an In-Plane compliant bistable micro-mechanism. Journal of Microelectromechanical Systems, 2002,11(5): 566~573

    [4] Walsh D, Culshaw B. Optically activated silicon micro-resonator transducers: an assessment of material properties. Sensors and Actuators, 1991,A27(1-3): 711~716

    [5] Liu Yueming,Tian Weijian,Zhang Shaojun, et al. Determination of Young′s modulus of micro-mechanical silicon films using an acoustic excitation and optical detection resonance method. Proceedings of the sixth ISMTII, 28 Nov- 1 Dec, 2003, Hong Kong University of Science and Technology, Kowloon, HongKong

    [8] Ye X Y, Zhou Z Y, Yang Y, et al. Determination of the mechanical properties of microstructure. Sensors and Actuators, 1996, A54(1-3): 750~754

    [in Chinese], [in Chinese]. Young′s Moduli Evaluation of Micro-machined Silicon Membranes Using Optically Excited Resonance and Optical Fiber Sensing Techniques[J]. Acta Photonica Sinica, 2005, 34(6): 877
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