Researching | Researching status and developing tendency of microaccelerometer

Journals >Optics and Precision Engineering >Volume 12 >Issue z1 >Page 81 > Article

Optics and Precision Engineering
Vol. 12, Issue z1, 81 (2004)

Researching status and developing tendency of microaccelerometer

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Researching status and developing tendency of microaccelerometer[J]. Optics and Precision Engineering, 2004, 12(z1): 81 Copy Citation Text

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References

[6] MUKHERJEE T. System-Level modeling and design of integrated mems[R] ,http:∥www. ece. cmu. edu/～mems.

CLP Journals

[1] Shuai HAN, Xinjie ZHANG, Qiao GU, Yao LIU, Xinyi WANG. Inertial focusing effect of particles in spiral microchannel with asymmetric cross-section[J]. Optics and Precision Engineering, 2022, 30(3): 310

[2] [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of micro spiral acceleration switch using UV-LIGA technology[J]. Optics and Precision Engineering, 2010, 18(5): 1152

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Researching status and developing tendency of microaccelerometer[J]. Optics and Precision Engineering, 2004, 12(z1): 81

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