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    Journals >Optics and Precision Engineering >Volume 11 >Issue 5 >Page 492 > Article
    • Optics and Precision Engineering
    • Vol. 11, Issue 5, 492 (2003)
    [in Chinese]
    1, 1, and 2
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2003, 11(5): 492 Copy Citation Text show less
    References

    [1] HOLMES M,HOCKEN R, TRUMPER D. The long-range scanning stage: a novel platform for scanned-probe microscopy[J]. Precision Engineering,2000,(24):191-209.

    [5] TRAUNTEUT A T. Technology and applications of grating interferometers in high-precision measurement[J]. Precision Engineering,1992,14(3):147-154.

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    [in Chinese], [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2003, 11(5): 492
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