The precision deposition of micro/nano patterns printed by Electrohydrodynamic Direct Writing (EDW) technology was explored and the EDW for orderly nanofibers was implemented by the straight stable jet between a spinneret and a collector. The deposition behaviors of EDW jet on stationary and moving substrates were investigated. The effects of process parameters on the position errors of EDW patters were also studied. The experiments show that the jet is bended into a spiral structure by the inner stress and charge repulse force, and then the nanofiber is guided to form a three-dimensional fibrous microstructure on the stationary substrate. By increasing the velocity of collector, the bending process of charged jet can be overcome and the straight line nanofiber without spiral coil is direct-written on the substrate. The multi rectangle wave and square wave nanofibrous patterns are direct-written according to the designed pattern, respectively, and the dimension error between the direct-written nanofibrous pattern and designed pattern is also analyzed. The results indicates that the position error of direct-written nanofibrous pattern increases with increasing the velocity of collector, the distance between spinneret and collector, applied voltage, and the motion distance of collector. Moreover, by optimizing the experimental conditions and design parameters, the position error of direct-written fibrous pattern can be less than 10 μm. It concludes that the precision deposition of micro/nano pattern is benefit to promoting the control level of EDW technology.