• Acta Photonica Sinica
  • Vol. 40, Issue 11, 1657 (2011)
DUAN Guoping1、2、*, CHEN Junling1、2, HAN Junhe1、2, and HUANG Mingju1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/gzxb20114011.1657 Cite this Article
    DUAN Guoping, CHEN Junling, HAN Junhe, HUANG Mingju. Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuouswave Laser[J]. Acta Photonica Sinica, 2011, 40(11): 1657 Copy Citation Text show less

    Abstract

    Intrinsic amorphous silicon thin films were prepared by plasma enhanced chemical vapor deposition method,and the crystallization of the films by 488 nm and 514 nm continuouswave laser under different power densities and irradiation time were studied by microRaman spectroscopic measurements. It is shown that intrinsic amorphous silicon films are able to be crystallized within 60 s at laser power densities is above 1.575×105 W/cm2. When the power density reaches to 2.756×105 W/cm2, there is transformation from amorphous silicon to singlecrystalline silicon. With the increase of the laser power density, it is still singlecrystalline silicon. At the laser power density of 2.362 ×105 W/cm, 60 s irradiation time crystallized the effect is better; and at the power density of 2.756×105 W/cm2, the effect of crystallization with 488 nm wavelength is better than that of with 514 nm in 60 s, and they are all singlecrystalline silicon.
    DUAN Guoping, CHEN Junling, HAN Junhe, HUANG Mingju. Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuouswave Laser[J]. Acta Photonica Sinica, 2011, 40(11): 1657
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