[1] FUJITA H. A decade of MEMS and its future[D]. In Proc. of the IEEE MEMS, 1997: 1-8

[2] SHOJITT S, ESASHIT M. Microfolw devices and systems[J]. J. Micromech. Microeng.,1994, (4): 157-171

[3] van LINTEL H T G, van DE POL F C M, BOUWSTRA S. A piezoelectric micropump based on mocromachining of silicon [J]. Sensors and Actuators, 1988,15:153-167

[4] MAILEFER D, VAN LINTEL H, MERMET G R, et al. A high-performance silicon micropump for an implantable drug delivery system [C]. Proc. 12th IEEE MEMS 1998 Technical Digest, Orlando, Florida, USA, 1998: 541-546.

[5] SHOJI S, NAKAGAWA S, ESASHI N. Micropump and sample-injector for integrated chemical analysis system [J]. Sensors and Actuators A, 1990, 21-23:189-192.

[6] EDERER I, RAETSCH P, SCHULLERUS W, et al. Piezoelectrically driven micropump for on-demand duel-drop generation in an automobile heater with continuously adjustable power output [J]. Sensors and Actuators A, 1997,62:752-755.

[9] WU X W,CHENG G M,JACKSON D J, et al. A new kind of single stator multi-freedom piezoelectric motor driven by single frequency standing wave[C]. IEEE(EIT2000,Chicago, USA. ),2000.

[10] TRUONG T Q. A polymeric piezoelectric micropump based on lamination technology[J]. J.Micromech. Microeng. , 2004, (14): 632-638.

[11] ZHANG J H,XIA Q X,WANG D K, et al. Sample theorem to periodic non-continuous signal from cavitation of piezoelectric pump [J]. Optics and Precision Engineering, 2002,10 (5):476-482

[14] TEYMOORI M M,ABBASPOUR S E. Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications[J]. Sensors and Actuator A. , 2004, 117(2): 222-229