Vapor Etching Method for Diamond Wire Sawn Multicrystalline Silicon Wafers

LIU Xiao-mei; CHEN Wen-hao; LI Miao; ZHOU Lang

doi:10.3788/gzxb20144311.1116006

[1] BIFIBILLR A, WASMER K, KRAFT R, et al. Diamond wire-sawn silicon wafers–from the lab to the cell production［C］. Proceedings of the 24th European Photovolatic Solar Energy Conference and Exhibition, 2009(PV-LAB-CONF-2010-026): 1400-1405.

[2] CHEN C C A, CHAO P H. Surface texture analysis of fixed and free abrasive machining of silicon substrates for solar cells［C］. Advanced Materials Research, 2010, 126-128: 177-180.

[3] HOLT A, THOGERSEN A, ROHR C, et al. Surface structure of mono-crystalline silicon wafers produced by diamond wire sawing and by standard slurry sawing before and after etching in alkaline solutions［C］. IEEE Photovoltaic Specialists Conference (PVSC), 2010, 3501-3504.

[4] KRAY D, SCHUMANN M, EYER A, et al. Solar wafer slicing with loose and fixed grains; proceedings of the photovoltaic energy conversion［C］. Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, 2006, 4: 948-951.

[5] MEINEL B, KOSCHWITZ T, ACKER J. Textural development of SiC and diamond wire sawed Sc-Silicon wafer［J］. Energy Procedia, 2012, 27: 330-336.

[6] CHEN Wen-hao, LI Miao, LIU Xiao-mei, et al. Research of the cutting marks on diamond wire cut multicrystalline silicon wafers and the method to remove them［J］. Jouranl of Synthetic Crystals, 2014, 2(14): 314-320.

[7] LIU Xiao-mei, LI Miao, CHEN Wen-hao, et al. The surface characteristics of diamond wire sawn multicrystalline silicon wafers and their acidic texturization［J］. Acta Photonica Sinica, 2014, 43(8): 0816001.

[8] ZHANG Fa-yun, YE Jian-xiong. Texturing of multicry stalline silicon with acidic etching［J］. Acta Photonica Sinica, 2011, 40(2): 222-226.

[9] XIE C, EICHMAN D J. Pretreatment process for a surface texturing process［M］. Google Patents. 2001.

[10] NOSITSCHKA W, VOIGT O, MANSHANDEN P, et al. Texturisation of multicrystalline silicon solar cells by RIE and plasma etching［J］. Solar Energy Materials and Solar Cells, 2003, 80(2): 227-237.

[11] RUBY D, ZAIDI S, NARAYANAN S, et al. Rie-texturing of multicrystalline silicon solar cells［J］. Solar Energy Materials and Solar Cells, 2002, 74(1): 133-137.

[12] WINDERBAUM S, REINHOLD O, YUN F. Reactive ion etching (RIE) as a method for texturing polycrystalline silicon solar cells［J］. Solar Energy Materials and Solar Cells, 1997, 46(3): 239-248.

[13] DOU Wei-jiang, QIN Ying-xiong, JU Xiao-bao, et al. Diffusion processing and its matching property of multicrystalline silicon solar cells through RIE texturing［J］. Acta Photonica Sinica, 2013, 42(6): 649-653.

[14] JANSEN H, DE BOER M, LEGTENBERG R, et al. The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control［J］. Journal of Micromechanics and Microengineering, 1995, 5(2): 115-121.

[15] TENG Fan, LIU Zhi-ling, PENG Huan, et al. Light reflectivity calculation of acid corrosion surface of multicrystalline silicon［J］. Acta Energiae Solaris Sinica, 2009, 30(10): 1319-22.