Fabrication of SOI structure by means of laser annealed neutron-irradiated single crystal silicon

Wang Shen; Li Qiong; Lin Chenglu

Journals >Chinese Journal of Lasers >Volume 15 >Issue 11 >Page 701 > Article

Chinese Journal of Lasers
Vol. 15, Issue 11, 701 (1988)

Fabrication of SOI structure by means of laser annealed neutron-irradiated single crystal silicon

Wang Shen¹, Li Qiong², and Lin Chenglu²

Author Affiliations

¹[in Chinese]

²[in Chinese]

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Wang Shen, Li Qiong, Lin Chenglu. Fabrication of SOI structure by means of laser annealed neutron-irradiated single crystal silicon[J]. Chinese Journal of Lasers, 1988, 15(11): 701 Copy Citation Text

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References

[2] Fan J С О et al. Phys. Lett., 38, 365 (1981)

[3] Lam Η W et al. J. Crystal Growth, 63, 554 (1983)

[4] Yu Quoe Ho,Takuo Sugano. IEEE Trans, on Electron Devices, ED-29, 487 (1992)

[5] Lee Υ Η et al. Phys. Rev. B, 8, 2810 (1973)

Wang Shen, Li Qiong, Lin Chenglu. Fabrication of SOI structure by means of laser annealed neutron-irradiated single crystal silicon[J]. Chinese Journal of Lasers, 1988, 15(11): 701

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