• Optics and Precision Engineering
  • Vol. 18, Issue 5, 1042 (2010)
CHEN Hong-fang1,*, ZHONG Zhi2, and DING Xue-mei3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: Cite this Article
    CHEN Hong-fang, ZHONG Zhi, DING Xue-mei. Compensation of nonlinear errors in laser heterodyne interferometers[J]. Optics and Precision Engineering, 2010, 18(5): 1042 Copy Citation Text show less

    Abstract

    To compensate the nonlinear errors of heterodyne interferometers in nanometer measurement, an experimental investigation is conducted.Based on the polarization properties of a coated corner-cube retro-reflector, a model is derived for describing the effect of the axial rotation of a measuring cube-corner retro-reflector in the motion direction on the first-harmonic nonlinearity when a laser emits the elliptical polarized light.The simulation results indicate that the first-harmonic nonlinearity can be reduced by the axial rotation of the cube-corner retro reflector.The experimental result shows that the first harmonic nonlinearity is reduced from 3.48 to 1.39 nm when the axial orientation rotation angle of the measuring cube-corner retro reflector increases from 0° to 100°,which is 40% that of the original one.The method simplies the complexes of light path and circuit systems for nonlinear error compensation approaches.
    CHEN Hong-fang, ZHONG Zhi, DING Xue-mei. Compensation of nonlinear errors in laser heterodyne interferometers[J]. Optics and Precision Engineering, 2010, 18(5): 1042
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