XING Xu, CHANG Di, HU Peng-cheng, TAN Jiu-bin. Spatially separated heterodyne grating interferometer for in-plane displacement measurement[J]. Optics and Precision Engineering, 2019, 27(8): 1727

Search by keywords or author
- Optics and Precision Engineering
- Vol. 27, Issue 8, 1727 (2019)
Abstract

Set citation alerts for the article
Please enter your email address