High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry

Qinyuan Deng; Yan Tang; Yi Zhou; Yong Yang; Song Hu

doi:10.3788/CJL201845.0604001

Journals >Chinese Journal of Lasers >Volume 45 >Issue 6 >Page 0604001 > Article

Chinese Journal of Lasers
Vol. 45, Issue 6, 0604001 (2018)

High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry

Qinyuan Deng^1、2, Yan Tang^{、* *}, Yi Zhou^1、2, Yong Yang¹, and Song Hu¹

Author Affiliations

¹ State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics,Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

² University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/CJL201845.0604001 Cite this Article Set citation alerts

Qinyuan Deng, Yan Tang, Yi Zhou, Yong Yang, Song Hu. High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry[J]. Chinese Journal of Lasers, 2018, 45(6): 0604001 Copy Citation Text

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