Design and Fabrication of C-Band Laterally Excited Bulk

WU Gaomi; MA Jinyi; LI Shangzhi; SI Meiju; TANG Xiaolong; JIANG Shiyi; JIANG Hongmin; ZHANG Zuwei

doi:10.11977/j.issn.1004-2474.2024.03.001

Journals >Piezoelectrics & Acoustooptics >Volume 46 >Issue 3 >Page 285 > Article

Piezoelectrics & Acoustooptics
Vol. 46, Issue 3, 285 (2024)

Design and Fabrication of C-Band Laterally Excited Bulk

WU Gaomi^1,2,3, MA Jinyi^2,3, LI Shangzhi^1,2,3, SI Meiju^2,3..., TANG Xiaolong^2,3, JIANG Shiyi^2,3, JIANG Hongmin^2,3 and ZHANG Zuwei^2,3|Show fewer author(s)

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¹[in Chinese]

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DOI: 10.11977/j.issn.1004-2474.2024.03.001 Cite this Article

WU Gaomi, MA Jinyi, LI Shangzhi, SI Meiju, TANG Xiaolong, JIANG Shiyi, JIANG Hongmin, ZHANG Zuwei. Design and Fabrication of C-Band Laterally Excited Bulk[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 285 Copy Citation Text

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References

[1] YU Xiaoquan, HE Jie, MA Jinyi.Recent advances and prospects of Lamb wave devices based on piezo-MEMS［J］.Piezoelectrics & Acoustooptics, 2022, 44(2)：223-229.

[2] SHAO Shuai, LUO Zhifang, WU Tao.High figure-of-merit Lamb wave resonators based on Al0.7Sc0.3N thin film［J］.IEEE Electron Device Letters, 2021, 42(9):1378-1381.

[3] YANG Yansong, LU Ruochen, GONG Songbin.High Q antisymmetric mode lithium niobate MEMS resonators with spurious mitigation［J］.Journal of Microelectromechanical Systems, 2020, 29(2):135-143.

[4] PLESSKY V, YANDRAPALLI S, TURNER P J, et al.5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate［J］.Electronics Letters, 2019, 55(2): 98-100.

[5] PLESSKY V.XBAR (invited)［C］∥［S.l.］: 2022 IEEE International Ultrasonics Symposium (IUS), 2022.

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