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    Journals >Optics and Precision Engineering >Volume 12 >Issue z1 >Page 36 > Article
    • Optics and Precision Engineering
    • Vol. 12, Issue z1, 36 (2004)
    MOEMS device and its applications
    1,2, 1, 1, and 1
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. MOEMS device and its applications[J]. Optics and Precision Engineering, 2004, 12(z1): 36 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. MOEMS device and its applications[J]. Optics and Precision Engineering, 2004, 12(z1): 36
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