Hollow glass microspheres have been widely studied for their low density, high strength and high temperature resistance. Hollow structure of quartz glass microspheres (HSQGM) were prepared by spray granulation method combined with powder method, with the addition of foaming agent and radio frequency plasma as heat source. The effects of SiC, CaCO3 and CaSO4 foaming agents on the preparation of HSQGM were investigated. The results show that the foaming agent and silica are uniformly mixed to form coarse particles by spray granulation method, and then HSQGM are obtained by high temperature sintering of coarse powder by radio frequency plasma equipment. Among them, the effects of CaSO4 and CaCO3 are poor, and the generated gas are difficult to keep inside the glass microspheres to form hollow bubbles, while the effect of SiC is the best, which generates gas inside the glass microspheres in the process of radio frequency plasma sintering and is wrapped by liquid glass to form hollow structures. The average true density of the obtained glass microspheres is 1.799 5 g/cm3. In addition, Feilihua bulk loose quartz is selected as raw material for SiO2 and the HSQGM with an average true density of 0.72 g/cm3 are obtained when the mass ratio of SiO2, SiC and H2O is 100∶3∶300.