Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing

Yu ZHANG; Feng ZHANG; Rui GUO; Ying SU; Yunlong ZHANG; Zengqi XU; Fuchao WANG

doi:10.5768/JAO202243.0305002

Journals >Journal of Applied Optics >Volume 43 >Issue 3 >Page 518 > Article

Journal of Applied Optics
Vol. 43, Issue 3, 518 (2022)

Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing

Yu ZHANG, Feng ZHANG, Rui GUO, Ying SU..., Yunlong ZHANG, Zengqi XU and Fuchao WANG|Show fewer author(s)

Author Affiliations

Xi'an Institute of Applied Optics, Xi'an 710065, China

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DOI: 10.5768/JAO202243.0305002 Cite this Article

Yu ZHANG, Feng ZHANG, Rui GUO, Ying SU, Yunlong ZHANG, Zengqi XU, Fuchao WANG. Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing[J]. Journal of Applied Optics, 2022, 43(3): 518 Copy Citation Text

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Fig. 1. Analysis of workpiece offset

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Fig. 2. Tooling setting position 1

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Fig. 3. Tooling setting position 2

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Fig. 4. Experimental verification of aspheric magneto-rheological polishing tooling

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Fig. 5. Surface shape accuracy of workpiece before and after magneto-rheological polishing

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序号	$ c $	$L/{\rm_{mm}}$	${\beta _1}$/（°）	$r/{\rm{mm}}$	${d_1}/{\rm{mm}}$	$a/{\rm{mm}}$	$\Delta {X_2}/{\rm{mm}}$	$\Delta {X_2}/a$
1	0.0024888	150	15.3106	100	43.9396	1	−0.288	−0.288
						0.5	−0.144	−0.288
						0.1	−0.0288	−0.288
						0.01	−0.00288	−0.288
						−1	0.287	−0.287
2	0.002192	150	13.5188	100	51.0252	1	−0.253	−0.253
						0.5	−0.126	−0.252
						0.1	−0.0252	−0.252
						0.01	−0.00252	−0.252
						−1	0.252	−0.252
3	0.002641735	150	11.2069	100	26.3737	1	−0.333	−0.333
						0.5	−0.166	−0.332
						0.1	−0.0332	−0.332
						0.01	−0.00332	−0.332
						−1	0.332	−0.332

Table 1. Relationship between

Unknown environment 'document'

and

Unknown environment 'document'

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类型	参数
材料	熔石英
口径/mm	Φ230

Table 2. Parameters of Φ 230 mm aspheric mirror

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点	X/mm	Y/mm	A/(°)	B/(°)
1	−43.939 6	0	0	15.3106
2	43.939 6	0	0	−15.3106
3	0	47.426 0	15.177 9	0
4	0	−47.426 0	−15.177 9	0

Table 3. Coordinate values of tooling setting position

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方向	调整次数	${Z_1}/{\rm{mm} }$	${Z_2}/{\rm{mm}}$	ΔZ/mm	$a/{\rm{mm} }$
X	0	−62.637	−62.511	0.126	0.171
	1	−62.571	−62.574	0.003	0.004
Y	0	−62.222	−62.134	0.088	0.117
	1	−62.179	−62.166	0.013	0.018
	2	−62.178	−62.174	0.004	0.005

Table 4. Offset calculation

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