[1] YUE S J, CHENG K, BAI Q S, et al. Integrated design and analysis of a high-precision aerostatic spindle for internal grinding machines and its implementation perspectives［J］. Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology,2023,237(12):2187-2200.

[2] WUN B H, GE J T. Drilling vibration in a micro-drilling process using a gas bearing spindle［J］. Advances in Mechanical Engineering,2020,12(10):1687814020969008.

[4] SHI J H, CAO H R, JIN X L. Investigation on the static and dynamic characteristics of 3-DOF aerostatic thrust bearings with orifice restrictor［J］. Tribology International, 2019,138:435-449.

[9] ZHENG H, LU S, ZHAI Q, et al. Simulation and experiment of a diamond-type micro-displacement amplifier driven by piezoelectric actuator［J］. The Journal of Engineering,2020(5):141-147.

[12] YU S M, LIANG J Y, YANG F, et al. A novel inchworm piezoelectric actuator using two-stage amplification mechanism with high speed: design, modeling, and experimental evaluation［J］. Smart Materials and Structures,2023,32(5):055020.