Cunyu LI, Xiangping ZHU, Wei ZHAO, Jichao LI, Jingpeng HU. Optical Properties of Titanium-doped Gallium Oxide Thin Films by Thermal Atomic Layer Deposition[J]. Acta Photonica Sinica, 2023, 52(6): 0631002
- Acta Photonica Sinica
- Vol. 52, Issue 6, 0631002 (2023)
Fig. 1. XPS spectra of Ga2O3，TiO2 and TGO films
Fig. 2. XPS core level spectra of TiO2 film
Fig. 3. XPS core level spectra of Ga2O3 film
Fig. 4. O 1s core level spectra of Ga2O3 and TGO films
Fig. 5. GIXRD spectra of Ga2O3 and TGO films
Fig. 6. AFM morphology of TGO film with Ga（3）Ti（1）
Fig. 7. Refractive index and extinction coefficient of Ti-doped Ga2O3 films deposited on silicon
Fig. 8. Optical transmittance of Ga2O3，TiO2 and TGO thin films deposited on quartz
Fig. 9. Optical band gap of Ga2O3，TGO and TiO2 films
Fig. 10. The O 1s peak and Eg for Ga2O3 and TGO films
Fig. 11. Comparison of the band gap of Ga2O3 and TGO films by SP and XPS methods
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Table 1. The parameters during the reaction process and the thickness of films
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