• Optics and Precision Engineering
  • Vol. 20, Issue 4, 719 (2012)
LI Xian-ling*
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/ope.20122004.0719 Cite this Article
    LI Xian-ling. Design of CNC non-contact super-smooth polishing machine for optical components[J]. Optics and Precision Engineering, 2012, 20(4): 719 Copy Citation Text show less
    References

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    [2] LEISTNER A J, THWAITE E G, LESHA F, et al.. Polishing study using Teflon and pitch laps to produce flat and supersmooth surfaces [J]. Appl. Opt.,1992,31(10):1472-1482.

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    [8] ZHANG J F, WANG B, DONG SH. Application of atmospheric pressure plasma polishing method in machining of silicon ultra-smooth surface [J]. Opt. Precision Eng., 2007,15(11):1749-1755. (in Chinese)

    [9] SHI CH Y, YUAN J H, WU F, et al.. Influence analysis of impact angle on material removal profile in fluid jet polishing [J]. Acta Optica Sinica, 2010,30(2):513-517. (in Chinese)

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    CLP Journals

    [1] Liu Jian, Wang Shaozhi, Zhang Linghua, Wang Junlin. Computer Controlled Ultra-Smooth Polishing High Order Rotary Symmetrical Aspheric Lens[J]. Chinese Journal of Lasers, 2013, 40(8): 816001

    [2] YANG Zheng, JIN Zhi-wei, CHEN Jian-jun, RAO Xian-hua, YIN Shao-yun, WU Peng. Polishing method for polyimide membranes based on reactive ion etching[J]. Optics and Precision Engineering, 2019, 27(2): 302

    LI Xian-ling. Design of CNC non-contact super-smooth polishing machine for optical components[J]. Optics and Precision Engineering, 2012, 20(4): 719
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