Tianqi CHEN, Jian YANG, Tianqing JIA. A Study on Ablation Quality of Silicon by Femtosecond Laser Pulse Trains[J]. Acta Photonica Sinica, 2021, 50(6): 108
- Acta Photonica Sinica
- Vol. 50, Issue 6, 108 (2021)
Fig. 1. Schematic diagram of the experimental setup
Fig. 2. Generation of the pulse train by the FP cavity
Fig. 3. SEM images of the ablation craters under different laser modes and pulse train numbers
Fig. 4. Dependence of the redeposition thickness on the pulse interval （N =20）
Fig. 5. Dependence of the surface quality factor on the pulse interval （N =20）
Fig. 6. SEM images of the ablation craters under different laser modes （N =200）
Fig. 7. Dependence of the surface quality factor on the pulse interval （N =200）
Fig. 8. Comparison of contamination and thermal damage caused by dust
Fig. 9. Illustration of ablation mechanism of the four typical laser modes
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