Effect of 3/SiH4 Flow Rate Ratio on the Performance of Polysilicon/SiN Composite Solar Cell

Zhao Haofeng; Wang Ling; Xie Aigeng; Yan Kai; Wu Hongyan; Liu Bin; Huang Tingli; Xiao Yuhui

Journals >Chinese Journal of Lasers >Volume 35 >Issue s2 >Page 328 > Article

Chinese Journal of Lasers
Vol. 35, Issue s2, 328 (2008)

Effect of ₃/SiH₄ Flow Rate Ratio on the Performance of Polysilicon/SiN Composite Solar Cell

Zhao Haofeng^*, Wang Ling, Xie Aigeng, Yan Kai, Wu Hongyan, Liu Bin, Huang Tingli, and Xiao Yuhui

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[in Chinese]

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Zhao Haofeng, Wang Ling, Xie Aigeng, Yan Kai, Wu Hongyan, Liu Bin, Huang Tingli, Xiao Yuhui. Effect of ₃/SiH₄ Flow Rate Ratio on the Performance of Polysilicon/SiN Composite Solar Cell[J]. Chinese Journal of Lasers, 2008, 35(s2): 328 Copy Citation Text

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Abstract

SiN thin film has the passive role and the good nature of reducing the reflection, so it already be widely applied in the crystal silicon solar cell's fabrication technology. This paper deals with effect of NH3/SiH4 on the performance of solar cell. The test results show that NH3/SiH4 gas ratio affect the transforming efficiency and minority carrier lifetime of solar cell and optimized NH3/SiH4 is 11.5∶1.

Keywords

minority carrier lifetime opto-electronic transforming efficiency poly-silicon/ SiN composite solar cells

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