Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 28 >Issue 5 >Page 455 > Article

Chinese Journal of Lasers
Vol. 28, Issue 5, 455 (2001)

Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy[J]. Chinese Journal of Lasers, 2001, 28(5): 455 Copy Citation Text

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Abstract

In this paper, a new method is proposed to enlarge the measurement range of the LD-SPM interferometer with a photothermal wavelength modulation. Using this method, the measurement range is enlarged from half wavelength to 125.56 μm and the measurement accuracy is 1.2 nm. The possibility of further enlarging the measurement range is discussed.

Keywords

interferometer laser diode optical measurement photothermal modulation nanometer measurement

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