Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
The advantages of manufacturing a space aspheric mirror of SiC material are analyzed, and the key methods and technology of fabricating and measuring SiC aspheric surfaces are introduced and researched. The off-axis SiC aspheric mirror is ground and polished by computer controlled optical surfacing (CCOS) technology with a FSGJ-2 numerical control machine, the contour and optical parameters are measured and controlled by a coordinate measuring machine (CMM) and laser tracker. Finally, an example for fabricating and testing an off-axis parabolic mirror with an aperture of 820 mm is given. A null lens is specifically designed and customized in order to test the large aspheric mirror by interferometry and null compensation. The resulting PV and RMS of the surface error are and ( is 632.8 nm), respectively, which meets the requirements of the optical design.