• Acta Photonica Sinica
  • Vol. 42, Issue 5, 515 (2013)
HE Fengtao1,*, ZHOU Qiang1,2, YANG Wenzheng3, LONG Xuewen2..., BAI Jing2 and CHENG Guanghua2|Show fewer author(s)
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  • 1[in Chinese]
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    DOI: 10.3788/gzxb20134205.0515 Cite this Article
    HE Fengtao, ZHOU Qiang, YANG Wenzheng, LONG Xuewen, BAI Jing, CHENG Guanghua. Femtosecond Laser Multibeam Interference Lithography Antireflective Microstructure on Silicon Surface[J]. Acta Photonica Sinica, 2013, 42(5): 515 Copy Citation Text show less
    References

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    [3] SHEN M Y, CROUCH C H, CAREY J E, et al. Femtosecond laserinduced formation of submicrometer spikes on silicon in water[J]. Applied Physics Letters, 2004, 85(23): 5694-5696.

    [4] SHEN M Y, CROUCH C H, CAREY J E, et al. Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask[J]. Applied Physics Letters, 2003, 82(11): 1715-1717.

    [5] IMAMOTO H, KANEHIRA S, WANG X, et al. Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser[J]. Optics Letters, 2011, 36(7): 1176-1178.

    [6] HAYASAKI Y, NISHITANI M, TAKAHASHI H, et al. Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing[J]. Applied. Physics. A: Materials Science and Processing, 2012, 107(2): 357-362.

    [7] ZHANG Heng, ZHOU Yun, ZHOU Lei, et al. Fabrication of micrograting structures by nanosecond laser ablation of chrome film on glass substrate[J]. Acta Photonica Sinica, 2009, 38(2): 241-244.

    [8] SI J H, QIU J R, ZHAI J F. Photoinduced permanent gratings inside bulkazodyedoped polymers by the coherent field of a femtosecond laser[J]. Applied Physics Letters, 2002, 80(3): 359-361.

    [9] LI Xiang, PANG Zhaoguang, ZHANG Xingping. Fabrication of largearea gold nanowires grating[J]. Acta Photonica Sinica, 2011, 40(12): 1850-1854.

    [10] JIA X, JIA T Q, DING L E, et al. Complex periodic micro/nanostructures on 6HSiC crystal induced by the interference of three femtosecond laser beams[J]. Optics Letters, 2009, 34(6): 788-790.

    [11] SUN Huiting, SONG Zhengxun, WENG Zhankun, et al. Fabrication of twodimensional photonic crystal structure with defect by holographic lithography and twophoton polymerization[J]. Acta Photonica Sinica, 2011, 40(z1): 1-6.

    [12] KONDO T, MATSUO S, JUODKAZIS S, et al. Femtosecond laser interference technique with diffractive beam splitter for fabrication of threedimensional photonic crystals[J]. Applied Physics Letters, 2001, 79(6): 725-727.

    [13] LEI M, YAO B L, RUPP R A. Structuring by multibeam interference using symmetric pyramids[J]. Optics Express, 2006, 14(12): 5803-5811.

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    HE Fengtao, ZHOU Qiang, YANG Wenzheng, LONG Xuewen, BAI Jing, CHENG Guanghua. Femtosecond Laser Multibeam Interference Lithography Antireflective Microstructure on Silicon Surface[J]. Acta Photonica Sinica, 2013, 42(5): 515
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