• Chinese Journal of Lasers
  • Vol. 41, Issue 8, 808003 (2014)
Liu Tao1、*, Xu Wendong1, Zhao Chengqiang1, Wang Chuang2, Hu Yonglu1, and Liu Yang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/cjl201441.0808003 Cite this Article Set citation alerts
    Liu Tao, Xu Wendong, Zhao Chengqiang, Wang Chuang, Hu Yonglu, Liu Yang. High Sensitivity Pneumatic Micro-Distance Measurement System for Lithography Autofocus[J]. Chinese Journal of Lasers, 2014, 41(8): 808003 Copy Citation Text show less
    References

    [1] Gao Shiyou, Ma Lei, Zhang Runsheng. Method of monitoring cutting point state in laser cutting plank process based on vision[J]. Chinese J Lasers, 2012, 39(2): 0203007.

    [2] Xi Mingzhe, Gao Shiyou. Microstructures and mechanism of cracks forming of rene 80 high-temperature alloy fabricated by laser rapid forming process[J]. Chinese J Lasers, 2012, 39(8): 0803008.

    [3] Chen Hong, Wu Shikai, Zhang Zhengwei, et al.. The effect of laser beam characteristics on laser processing[J]. Optical Technique, 2006, 32(6): 834-837.

    [4] Dai Liming, Jiang Tongjun. The laser triangulation measuring sensor for accurate displacement measurment[J]. Chinese Journal of Science Instrument, 1994, 15(4): 400-404.

    [5] Chen Lin. The 3-dimension measuring system based on the laser ranging[J]. Optical Instruments, 2002, 24(2): 7-12.

    [6] I Sherrington, E Smith. Modern measurement techniques in surface metrology: part II; optical instruments[J]. Wear, 1988, 125(3): 289-308.

    [7] Yan Wei, Liang Yiyong, Yang Guoguang. Analysis of dynamic characteri stics of focusing system based on PZT micro-actuator[J]. Optical Instruments, 2006, 28(2): 56-60.

    [8] Zhou Hao, Wang Xuanze, Zhai Zhongsheng, et al.. Research on fringe shape recognition methods based on circular four-quadrant photoelectric detector[J]. Chinese J Lasers, 2012, 39(7): 0708002.

    [9] Zheng Chunyang, Li Yongxin, Li Shengli. An automatic focusing control system for acquisition of CCD image[J]. Measurement and Control Technology, 2004, 23(5): 51-53.

    [10] Thomas T, Hamaker C, Martyniuk J, et al.. Nanometer-level autofocus air gauge[J]. Precision Engineering, 1998, 22(4): 233-242.

    [11] Allen P C, Buck P D. Resolution performance of a 0.60-NA, 364-nm laser direct writer[C]. SPIE, 1990, 1264: 454-465.

    [12] Kawashima K, Kato T, Sawamoto K, et al.. Realization of virtual sub chamber on active controlled pneumatic isolation table with pressure differentiator[J]. Precision Engineering, 2007, 31(2): 139-145.

    [13] Stoyanov B, Beyazov J, Peichev V. Static Characteristics of a Fluid “Flapper-and-Nozzle” Sensor[OL]. www.cit.iit.bas.bg/CIT_01/2-01/86-92.pdf.[2014-04-25].

    [14] Bokov V B. Focus system sensor characterisation by mechanistic-empirical modelling[J]. Int J Production Research, 2009, 47(11): 2995-3011.

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    [1] Chen Li, Wang Junhua, Xu Min. Analysis and Calibration of Defocus Detection System Based on Astigmatism Method[J]. Laser & Optoelectronics Progress, 2016, 53(5): 51205

    Liu Tao, Xu Wendong, Zhao Chengqiang, Wang Chuang, Hu Yonglu, Liu Yang. High Sensitivity Pneumatic Micro-Distance Measurement System for Lithography Autofocus[J]. Chinese Journal of Lasers, 2014, 41(8): 808003
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