• Optics and Precision Engineering
  • Vol. 18, Issue 4, 928 (2010)
CHEN Ji1,*, ZHAO Xiao-ming1, CAO Jiu-da2, and GUO Chao1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    CHEN Ji, ZHAO Xiao-ming, CAO Jiu-da, GUO Chao. Development and test of high-speed movement measuring machine[J]. Optics and Precision Engineering, 2010, 18(4): 928 Copy Citation Text show less
    References

    [1] ZHANG H T, FEN T J,CAO H T,et al..Key technology and development trend of high speed machine tool[J].Machinery Manufacture,2006,44(3):12-14.(in Chinese)

    [2] SUN B Y,LIANG SH Q,SONG W R,et al..Linear drive technology and its application to a magnetic levitation stage in the microelectronic field[J].Opt.Precision Eng., 2003,11(4):338-342.(in Chinese)

    [3] YANG K M,YE P Q,YIN W SH.Motion controller design of precision stage based on linear motor[J].Micro of Abrication Technology,2005,9(3):76-79.(in Chinese)

    [4] LIU Q,ZHANG C P.H-type air-bearing motion stage driven by linear motor[J].Opt.Precision Eng.,2007,15(10):1540-1546.(in Chinese)

    [5] ZHANG C P,LIU Q.Development of high performance linear motor stage based on static-pressure air-bearing slider[J].Mechanical Science & Technology, 2006,10(10):1212-1216.(in Chinese)

    [6] LI J,LIU Y J,SUN L, et al..Dynamic characteristics of a novel 2-DOF high acceleration positioning mechanism[J].Opt.Precision Eng., 2008,16(5):851-855.(in Chinese)

    [7] SUO R, FAN ZH J, LI Y, et al..Dual-frequency laser interferometer present state and development[J].Laser & Infrared, 2004,34(4):251-253.(in Chinese)

    [8] JIE D G,LIU Y J,SUN N, et al..A high speed and high precision displacement measurement method using double grating scales[J].Opt.Precision Eng.,2007,15(7):1077-1083.(in Chinese)

    [9] WEN X L.Linear motor and its application in high-speed precise machine tool[J].Mechanical Research & Application, 2005,18(4):19-20.(in Chinese)

    CHEN Ji, ZHAO Xiao-ming, CAO Jiu-da, GUO Chao. Development and test of high-speed movement measuring machine[J]. Optics and Precision Engineering, 2010, 18(4): 928
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