Angle-deviation optical profilometer

Chen-Tai Tan; Yuan-Sheng Chan; Zhen-Chin Lin; Ming-Hung Chiu

doi:10.3788/COL201109.011201

Journals >Chinese Optics Letters >Volume 9 >Issue 1 >Page 011201 > Article

Chinese Optics Letters
Vol. 9, Issue 1, 011201 (2011)

Angle-deviation optical profilometer

Chen-Tai Tan, Yuan-Sheng Chan, Zhen-Chin Lin, and Ming-Hung Chiu

Author Affiliations

Department of Electro-Optical Engineering, National Formosa University, No. 64 Wunhua Road Huwei, Yunlin 632, China

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DOI: 10.3788/COL201109.011201 Cite this Article Set citation alerts

Chen-Tai Tan, Yuan-Sheng Chan, Zhen-Chin Lin, Ming-Hung Chiu. Angle-deviation optical profilometer[J]. Chinese Optics Letters, 2011, 9(1): 011201 Copy Citation Text

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Chen-Tai Tan, Yuan-Sheng Chan, Zhen-Chin Lin, Ming-Hung Chiu. Angle-deviation optical profilometer[J]. Chinese Optics Letters, 2011, 9(1): 011201

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