SBT Ferroelectric Thin Films Prepared by Pulsed Excimer Laser Deposition

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 24 >Issue 5 >Page 397 > Article

Chinese Journal of Lasers
Vol. 24, Issue 5, 397 (1997)

SBT Ferroelectric Thin Films Prepared by Pulsed Excimer Laser Deposition

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. SBT Ferroelectric Thin Films Prepared by Pulsed Excimer Laser Deposition[J]. Chinese Journal of Lasers, 1997, 24(5): 397 Copy Citation Text

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Abstract

The perovskite like SrBi 2Ta 2O 9 thin films have been successfully prepared on Si/SiO 2/Ti/Pt substrate by pulsed eximer laser deposition. The crystallization and ferroelectric property were clearly dependent on the substrate temperature. The SrBi 2Ta 2O 9 thin film with fine grain size and well saturated square hysteresis loop was obtained at 450℃ substrate temperature. Good ferroelectric properties were obtained from the SBT film; Pr and Ec were 8.4 μC/cm 2 and 57 kV/cm, respectively.

Keywords

ferroelectric thin film pulsed eximer laser deposition SBT

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