• Chinese Optics Letters
  • Vol. 14, Issue 1, 011404 (2016)
Yanping Yuan* and Jimin Chen
Author Affiliations
  • Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
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    DOI: 10.3788/COL201614.011404 Cite this Article Set citation alerts
    Yanping Yuan, Jimin Chen. Grating-assisted fabrication of sub-wavelength ripples during femtosecond laser processing of dielectrics[J]. Chinese Optics Letters, 2016, 14(1): 011404 Copy Citation Text show less

    Abstract

    During the formation of sub-wavelength ripples, the initial surface plasmon (SP)-laser interference plays an important role. In this Letter, the effects of grating structures on the distribution of the absorbed laser intensity, SP-laser coupling, free electron distributions, and ablation shapes are investigated by the plasma model, taking into consideration both the laser wave-particle duality and the transient localized changes of material properties. The simulation results show that the grating structures can strongly enhance the energy absorption and SP-laser coupling, which makes the fabrication of sub-wavelength ripples more efficient. It is also found that the ablation shapes, in terms of ablation depths and sub-wavelength ripples periods, are strongly related to the grating structures, which can be used to control micro/nanostructures precisely and uniformly.
    H⃗i(t,r,z)=H0exp(2ln2t2tp2r2r02)exp(α(t,r,z)z)exp(i(krr+kzz)iwt),(1)

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    I(t,r,z)=|E⃗(t,r,z)×H⃗(t,r,z)|.(2)

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    ne(t,r,z)t=αiI(t,r,z)ne(t,r,z)+δN(I(t,r,z))Nne(t,r,z)τ,(3)

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    Ce(Te,ne)ne(t,r,z)Te(t,r,z)t=αh(t,r,z)I(t,r,z),(4)

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    Yanping Yuan, Jimin Chen. Grating-assisted fabrication of sub-wavelength ripples during femtosecond laser processing of dielectrics[J]. Chinese Optics Letters, 2016, 14(1): 011404
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