Liangle Zhang, Xiaoquan Han, Wanlu Xie, Xiaobin Wu, Xuchen Fang, Zixiang Gao, Pengfei Sha, Kuibo Wang. High-Precision Extreme Ultraviolet Reflectometry Based on Normalization[J]. Chinese Journal of Lasers, 2024, 51(7): 0701015
- Chinese Journal of Lasers
- Vol. 51, Issue 7, 0701015 (2024)
Fig. 1. Schematic diagram of extreme ultraviolet reflectometer
Fig. 2. Single pulse energy of focused beam versus electric pulse energy
![Spectral response of detector. (a) AXUV100G; (b) SXUV100[20-21]](/Images/icon/loading.gif){kind=icon}
Fig. 4. Spectral response of two detectors as a function of injected electrical pulse energy from the light source
Fig. 5. Schematic diagram of normalization
Fig. 6. Variation curves of reference and experimental beam energy decay over time
Fig. 7. Reflectivity measurement curves of Mo/Si multilayer mirror. (a) Reflectivity-angle curves before normalization; (b) reflectivity-angle curves after normalization
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Table 1. Signal-to-noise ratio of single-pulse energy for focused beams
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Table 2. Variation of incidence beam energy over time
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Table 3. Variation of reflectivity repeatability near the center angle before and after normalization of Mo/Si multilayer mirror
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