• Chinese Journal of Lasers
  • Vol. 31, Issue 3, 350 (2004)
[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Composite-Light-Source Interferometer for Real-Time Micro-Vibration Measurement[J]. Chinese Journal of Lasers, 2004, 31(3): 350 Copy Citation Text show less

    Abstract

    A novel LD-SPM interferometer, which can be used to measure micro-vibrations with a high accuracy in real time, is proposed. In this paper, a composite light source is employed to decrease the measurement errors caused by the light-intensity changes. Experiments verify the usefulness of the interferometer.
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Composite-Light-Source Interferometer for Real-Time Micro-Vibration Measurement[J]. Chinese Journal of Lasers, 2004, 31(3): 350
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