Zhongbiao Chen, Bifeng Cui, Xiangrui Zheng, Chunpeng Yang, Bozhao Yan, Qing Wang, Xinyu Gao. Optimization of Oxidation for Vertical Cavity Surface Emitting Semiconductor Lasers[J]. Chinese Journal of Lasers, 2024, 51(8): 0801003
- Chinese Journal of Lasers
- Vol. 51, Issue 8, 0801003 (2024)
Fig. 1. Schematic of VCSEL epitaxial structure
Fig. 2. Production process of oxide aperture for VCSEL based on (NH4)2S wet passivation
Fig. 3. SEM pictures of sample sidewalls under different oxidation process conditions. (a) Sample 1,traditional oxidation; (b) sample 2, oxidation after passivation
Fig. 4. Micrographs of sample oxide apertures
Fig. 5. Oxidation depth versus time
Fig. 6. P-I-V test curves of 940 nm VCSEL with oxide aperture size of 5 μm at room temperature (25 ℃)
Fig. 7. Measured spectra of VCSEL at room temperature (25 ℃). (a) Comparison of spectra of VCSEL under two process conditions when driving current is 1 mA; (b) spectrum of VCSEL before passivation whencurrent is 8Ith; (c) spectrum of VCSEL after passivation whencurrent is 8Ith
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