• Acta Photonica Sinica
  • Vol. 39, Issue 9, 1543 (2010)
WANG Sheng*, YE Jing-feng, LIU Jing-ru, BAI Ting, YE Xi-sheng, and WANG Li-jun
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  • [in Chinese]
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    DOI: Cite this Article
    WANG Sheng, YE Jing-feng, LIU Jing-ru, BAI Ting, YE Xi-sheng, WANG Li-jun. Optimal Simulation for the Thickness Uniformity of the Film Deposited by Pulse Laser Sputtering[J]. Acta Photonica Sinica, 2010, 39(9): 1543 Copy Citation Text show less
    References

    [1] LIU Jing-ru, BAI Ting, LI Tie-jun, et al. Study on pulsed excimer laser deposited films[J].High Power Laser and Particle Beams, 2002, 14(5): 646-650.

    [2] YAO Dong-sheng, LIU Jing-ru, WANG Li-ge, et al. Deposition of DLC film by ultrashort pulsed excimer laser[J]. Acta Optica Sinica, 1999, 19(2): 270-276.

    [3] BAI Ting, YE Jing-feng, LIU Jing-ru, et al. Pulsed excimer laser deposited diamond like carbon film on ZnS with wide-spectral transmission[J]. Chinese Journal of Laser, 2007, 34(7): 992-997.

    [4] LI Tie-jun, LIU Jing-ru, WANG Li-ge, et al. Pulsed laser deposition of DLC films over large area and it′s uniformity[J]. Acta Photonica Sinica, 1999, 28(5): 1080-1085.

    [5] GREER J A. Comparison of large area pulsed-laser deposition approaches[C]. SPIE, 1992, 1835: 21-30.

    [6] CHEUNG J T, HORWITZ J. Pulsed laser deposition history and laser target interactions[J]. MRS Bulletin,1992, 17(2): 30-36.

    [7] SUN Yi-ning, GUO Wan-tu, LI Jing-qi, et al. New progress of diamond films in aerospace application[J]. Chinese Space Science and Technology, 1997, 17(3):27-38.

    WANG Sheng, YE Jing-feng, LIU Jing-ru, BAI Ting, YE Xi-sheng, WANG Li-jun. Optimal Simulation for the Thickness Uniformity of the Film Deposited by Pulse Laser Sputtering[J]. Acta Photonica Sinica, 2010, 39(9): 1543
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