Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system

Jian Sun; Weili Zhang; Kui Yi; Jianda Shao

doi:10.3788/col201412.053101

Journals >Chinese Optics Letters >Volume 12 >Issue 5 >Page 053101 > Article

Chinese Optics Letters
Vol. 12, Issue 5, 053101 (2014)

Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system

Jian Sun, Weili Zhang, Kui Yi, and Jianda Shao

DOI: 10.3788/col201412.053101 Cite this Article Set citation alerts

Jian Sun, Weili Zhang, Kui Yi, Jianda Shao. Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system[J]. Chinese Optics Letters, 2014, 12(5): 053101 Copy Citation Text

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CLP Journals

[1] Chun Guo, Mingdong Kong, Wenyan He. Optimization of the spectral performance of an antireflection coating on a micro-spherical substrate[J]. Chinese Optics Letters, 2016, 14(9): 093101

Data from CrossRef

[1] Cheng Li, Shigeng Song, Des Gibson, David Child, Hin on Chu, Ewan Waddell. Modeling and validation of uniform large-area optical coating deposition on a rotating drum using microwave plasma reactive sputtering. Applied Optics, 56, C65(2017).

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