• Chinese Optics Letters
  • Vol. 8, Issue s1, 210 (2010)
Changlong Cai, Jing Huang, Yujia Zhai, Weihong Ma, and Weiguo Liu
Author Affiliations
  • Micro-Optoelectrical System Laboratory, Xi’an Technological University, Xi’an 710032, China
  • show less
    DOI: 10.3788/COL201008s1.0210 Cite this Article Set citation alerts
    Changlong Cai, Jing Huang, Yujia Zhai, Weihong Ma, Weiguo Liu. Patterning of PZT thin films[J]. Chinese Optics Letters, 2010, 8(s1): 210 Copy Citation Text show less
    References

    [1] Y. Xu, Ferroelectrics and Piezoelectric Materials (Science Press, Beijing 1978).

    [2] X. Hu, C. Huang, Y. Tai, and Y. Cai, Acta Photon. Sin. (in Chinese) 34, 1685 (2005).

    [3] J. Zuo, Erosions Data Manual (Chemical Industrial Press, Beijing 1982).

    [4] P. F. Baude, C. Ye, and D. L. Polla, in Proceedings of Materials Research Society Symposium 310, 139 (1993).

    [5] S. Mancha, M. Ivey, R. Carter, and G. Lavigne, 90 IEEE 7 Int Symp Appl Ferroelectr 737 (1992).

    [6] Q. Liu, Y. Lin, X. Wu, L. Zhang, and X. Yao, Piezoelectric and Acousto-Optic (in Chinese) 20, 411 (1998).

    [7] S. Ezhilvalavan and V. D. Samper, Appl. Phy. Lett. 86, 072901 (2005).

    [8] W. Liu, J. Ko, and W. Zhu, Materi. Sci. Lett. 19, 2263 (2000).

    [9] D. Xia, M. Liu, Y. Zeng, S. Chen, and X. Zhao, Piezoelectric & Acoustooptics 26, 196 (2004).

    CLP Journals

    [1] Jia Xu, Jianqiang Zhu, Fang Liu. Beam stability analysis of high power laser system based on relay imaging[J]. Collection Of theses on high power laser and plasma physics, 2012, 10(1): 91401

    [2] Chen Baosuan, Zhang Junyong, Zhang Yanli, Liu Dean, Zhu Jianqiang. Study of Small-Scale Self-Focusing in High-Power Laser System[J]. Laser & Optoelectronics Progress, 2012, 49(1): 10002

    Data from CrossRef

    [1] Jin-Hyung Lee, Il-Joo Cho, Kyungmin Ko, Eui-Sung Yoon, Hyung-Ho Park, Tae Song Kim. Flexible piezoelectric micromachined ultrasonic transducer (pMUT) for application in brain stimulation. Microsystem Technologies, 23, 2321(2017).

    [2] Phan Trong Tue, Tatsuya Shimoda, Yuzuru Takamura. Fine-patterning of sol-gel derived PZT film by a novel lift-off process using solution-processed metal oxide as a sacrificial layer. Ceramics International, 42, 18431(2016).

    Changlong Cai, Jing Huang, Yujia Zhai, Weihong Ma, Weiguo Liu. Patterning of PZT thin films[J]. Chinese Optics Letters, 2010, 8(s1): 210
    Download Citation