We propose a method to rapidly prepare LIG-based sensors on wood using laser. The integrated pressure and temperature sensor is prepared and its performance is tested. The optimal sample is obtained by using a fiber laser with a wavelength of 1070 nm, a laser pulse frequency of 10 kHz, a laser power of 10 W, the vacuum chamber pressure of 100 Pa, a defocus distance of 4 mm, a scanning speed of 100 mm·s-1, and marking time of 14. Its sheet resistance is 8 Ω·sq-1. The structure and forming mechanism of laser-induced graphene are obtained by SEM, Raman spectroscopy, and infrared spectra. The porous carbon pressure sensor and temperature sensor are fabricated. The sensitivity of the pressure sensor can reach 86.53. The hysteresis error is 0.06%. The non-linear error is 15%. The repeatability error is 0.31%. The response time and recovery time are both 1 s. The temperature coefficient of resistance of the temperature sensor is -0.101%. The sensing mechanisms of the LIG-based porous carbon pressure sensor and the temperature sensor are analyzed. Finally the integrated pressure and temperature sensor is made. The above LIG-based sensors have excellent sensing performances and are degradable. They have obvious commercial advantages and research prospects in current non-degradable electronic products that pollute the environment and have important applications in wooden construction and furniture.
Chen Li, Yanwei Yang, Tian Xia, Xiaohui Ye, Guanghua Cheng. Integrated Sensor Based on Laser-Induced Graphene on Wood[J]. Chinese Journal of Lasers, 2022, 49(2): 0202005