Optical properties and microstructure of two Ge-Sb-Se thin films

Lei Pan; Bao-An Song; Chuan-Fu Xiao; Pei-Qing Zhang; Chang-Gui Lin; Shi-Xun Dai

doi:10.7498/aps.69.20200145

Journals >Acta Physica Sinica >Volume 69 >Issue 11 >Page 114201-1 > Article

Acta Physica Sinica
Vol. 69, Issue 11, 114201-1 (2020)

Optical properties and microstructure of two Ge-Sb-Se thin films

Lei Pan^1、2, Bao-An Song^1、2、*, Chuan-Fu Xiao^1、2, Pei-Qing Zhang^2、3, Chang-Gui Lin^2、3, and Shi-Xun Dai^2、3

Author Affiliations

¹Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China

²Zhejiang Key Laboratory of Photoelectric Detection Materials and Devices, Ningbo University, Ningbo 315211, China

³Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China

show less

DOI: 10.7498/aps.69.20200145 Cite this Article

Lei Pan, Bao-An Song, Chuan-Fu Xiao, Pei-Qing Zhang, Chang-Gui Lin, Shi-Xun Dai. Optical properties and microstructure of two Ge-Sb-Se thin films[J]. Acta Physica Sinica, 2020, 69(11): 114201-1 Copy Citation Text

show less

Fig. 1. Schematic of the structure of a thin film coated on a transparent silica glass substrate.

Download full size | View in the Article

Fig. 2. Transmittance curve of Si-H thin film on finite glass substrate.

Download full size | View in the Article

$Comparison of refractive index and dispersion of thin film obtained by six different models.$

Fig. 3. Comparison of refractive index and dispersion of thin film obtained by six different models.

Download full size | View in the Article

$Relation between the refractive index and the dispersion obtained by six dispersion models (include MCM) and the true value as a function of wavelength: (a) Δnvs. wavelength; (b) ΔDvs. wavelength.$

Fig. 4. Relation between the refractive index and the dispersion obtained by six dispersion models (include MCM) and the true value as a function of wavelength: (a) Δnvs. wavelength; (b) ΔDvs. wavelength.

Download full size | View in the Article

Fig. 5. Comparison of five filtering methods to reduce noise: (a) Adjacent averaging method; (b) Savitaky-Golay method; (c) percentile filter method; (d) FFT filter method; (e) piecewise fitting method.

Download full size | View in the Article

Fig. 6. Transmission curve with upper and lower tangent envelopes obtained by using the improved Swanepoel method: (a) Ge₂₀Sb₁₅Se₆₅ film; (b) Ge₂₈Sb₁₂Se₆₀ film.

Download full size | View in the Article

$Refractive index and dispersion of Ge-Sb-Se films: (a) Refractive index vs. wavelength; (b) dispersion vs. wavelength.$

Fig. 7. Refractive index and dispersion of Ge-Sb-Se films: (a) Refractive index vs. wavelength; (b) dispersion vs. wavelength.

Download full size | View in the Article

Fig. 8. Absorption characteristics of Ge-Sb-Se films: (a) Absorption coefficient vs. wavelength; (b) square root of the product of the absorption coefficient and photon energy vs. the photon energy in the strong absorption region.

Download full size | View in the Article

Fig. 9. Raman spectrum of Ge-Sb-Se film.

Download full size | View in the Article

名称	模型
Cauchy	$n = A + \dfrac{B}{{{\lambda ^2}}} + \dfrac{C}{{{\lambda ^4}}}$
二阶归一化标准Sellmeier	$n = \sqrt {1 + \dfrac{{A \cdot {\lambda ^2}}}{{{\lambda ^2} - B}} + \dfrac{{C \cdot {\lambda ^2}}}{{{\lambda ^2} - D}}} $
三阶归一化标准Sellmeier	$n = \sqrt {1 + \dfrac{{A \cdot {\lambda ^2}}}{{{\lambda ^2} - B}} + \dfrac{{C \cdot {\lambda ^2}}}{{{\lambda ^2} - D}} + \dfrac{{E \cdot {\lambda ^2}}}{{{\lambda ^2} - F}}} $
二阶非标准形式的Sellmeier	$n = \sqrt {A + \dfrac{{B \cdot {\lambda ^2}}}{{{\lambda ^2} - C}} + D \cdot {\lambda ^2}} $
Conrady	$n = A + \dfrac{B}{\lambda } + \dfrac{C}{{{\lambda ^{3.5}}}}$
Herzberger	$n = A + B \cdot {\lambda ^2} + C \cdot {\lambda ^2} + \dfrac{D}{{\left( {{\lambda ^2} - 0.028} \right)}} + \dfrac{E}{{{{\left( {{\lambda ^2} - 0.028} \right)}^2}}}$

Table 1. [in Chinese]

λ	T_M	T_m	n	d	m₀	m	n₀	d₀
972.4	0.9202	0.5007	2.9173		6.001	6.0	2.9169	1000.0
911.2	0.9199	0.4904	2.9613		6.501	6.5	2.9611	1000.0
859.0	0.9193	0.4801	3.0066	1000.0	7.002	7.0	3.0062	1000.0
814.1	0.9183	0.4697	3.0527	1000.4	7.501	7.5	3.0526	1000.1
774.9	0.9165	0.4591	3.0996	1000.1	8.002	8.0	3.0993	1000.0
740.5	0.9134	0.4485	3.1471	999.5	8.502	8.5	3.1468	1000.0
710.0	0.9080	0.4376	3.1951	999.7	9.002	9.0	3.1947	1000.0
682.8	0.8984	0.4260	3.2435	999.4	9.502	9.5	3.2430	999.9
658.4	0.8818	0.4132	3.2921	1000.2	10.002	10.0	3.2917	1000.0
636.3	0.8530	0.3982	3.3410	999.3	10.503	10.5	3.3402	999.9
616.3	0.8050	0.3796	3.3898	999.6	11.003	11.0	3.3893	999.9
598.1	0.7252	0.3546	3.4335	1020.4	11.483	11.5	3.4387	1001.6
581.3	0.6127	0.3191	3.4878	1000.6	12.002	12.0	3.4874	1000.0
565.9	0.4595	0.2678	3.5368	981.9	12.502	12.5	3.5365	1000.0
551.7	0.2879	0.1965	3.5856	1001.6	13.001	13.0	3.5857	1000.1
注: $ \qquad \quad \overline d = 1000.2;{\sigma _1} = 7.58;\overline {{d_0}} = 1000.1;{\sigma _0} = 0.40$.

Table 2.

Values of λ, T_M, and T_m obtained in Fig. 2 and the values of n and d calculated by the improved Swanepoel method

由图2中数据获得的λ, T_M和T_m的值以及通过改进后的Swanepoel方法计算的n和d值

波长/nm	Ge₂₀Sb₁₅Se₆₅薄膜				Ge₂₈Sb₁₂Se₆₀薄膜
波长/nm	T_exp	T_M	m	n	T_exp	T_M	m	n
600	0.2449	0.2682	8.7331	2.6902	0.0009	0.0253	13.3793	2.8670
620	0.3463	0.4036	8.0131	2.6530	0.0417	0.0726	12.7620	2.8259
640	0.4987	0.5496	7.4160	2.6208	0.1107	0.0957	12.2073	2.7902
660	0.4749	0.6845	6.9106	2.5929	0.2449	0.2519	11.7057	2.7592
680	0.7724	0.7891	6.4760	2.5685	0.2914	0.3957	11.2495	2.7320
700	0.6566	0.8552	6.0972	2.5472	0.5222	0.5266	11.0259	2.7081
750	0.9088	0.9096	5.7634	2.5041	0.7469	0.7853	10.1068	2.6597
800	0.6160	0.9219	5.4665	2.4720	0.6155	0.9123	9.3455	2.6233
900	0.6199	0.9321	4.9602	2.4285	0.8667	0.9681	8.1494	2.5735
1000	0.7666	0.9388	4.5433	2.4014	0.7547	0.9735	7.2448	2.5420
1100	0.8085	0.9429	4.1932	2.3835	0.6124	0.9773	6.5316	2.5210
1200	0.7580	0.9455	3.8945	2.3711	0.9678	0.9805	5.9523	2.5062
1300	0.6850	0.9472	3.6364	2.3622	0.6186	0.9813	5.4709	2.4955
1400	0.9418	0.9480	3.4109	2.3556	0.9556	0.9806	5.0638	2.4875
1500	0.7814	0.9482	3.2121	2.3506	0.7282	0.9801	4.7145	2.4813
1600	0.6521	0.9479	3.0356	2.3466	0.6430	0.9800	4.4112	2.4765
1700	0.7244	0.9474	2.8776	2.3435	0.8853	0.9800	4.1452	2.4726
1800	0.8914	0.9470	3.1213	2.3410	0.9383	0.9801	3.9099	2.4694
1900	0.9384	0.9470	2.9544	2.3389	0.7164	0.9801	3.7002	2.4668
2000	0.8249	0.9476	2.8046	2.3372	0.6282	0.9800	3.5121	2.4647
2100	0.7121	0.9491	2.6694	2.3358	0.6868	0.9800	3.2838	2.4628
2200	0.6614	0.9518	2.5468	2.3345	0.8411	0.9801	3.1325	2.4613
2300	0.6679	0.9559	2.4349	2.3335	0.9705	0.9804	2.9947	2.4599
2400	0.7188	0.9617	2.3326	2.3326	0.9441	0.9809	2.8686	2.4588

Table 3.

Refractive index at multiple wavelengths of two thin films obtained by MCM.

多点柯西法获得的两种薄膜多个波长处的折射率

拉曼峰位/cm^–1	振动模式
160	Se₂Sb-SbSe₂结构中的Sb—Sb同极键的振动
170	Ge₂Se_6/2结构中的Ge—Ge同极键的伸缩振动
197	SbSe_3/2三角锥结构中的Sb—Se键的E₁模式振动
203	共顶角GeSe_4/2四面体中的Ge—Se键的V₁模式振动
215	共边GeSe_4/2四面体中的Ge—Se键振动
235	Se_n环结构中的Se—Se键振动
256	Se_n链结构中的Se—Se键振动
270	Ge-Ge_mSe_4-m结构中的Ge—Ge同极键的振动
303	GeSe₄四面体的F₂型不对称振动

Table 4.

Vibration modes in the Raman spectrum of Ge-Sb-Se system.

Ge-Sb-Se薄膜拉曼光谱中对应的振动模式

Lei Pan, Bao-An Song, Chuan-Fu Xiao, Pei-Qing Zhang, Chang-Gui Lin, Shi-Xun Dai. Optical properties and microstructure of two Ge-Sb-Se thin films[J]. Acta Physica Sinica, 2020, 69(11): 114201-1

Download Citation

Tools

Save the article for my favorites

Paper Information