Chunan XUE, Jun YU, Pengfeng SHENG, Haojie WANG, Zhanshan WANG, Dongfang WANG. High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes[J]. Optics and Precision Engineering, 2024, 32(13): 2004
- Optics and Precision Engineering
- Vol. 32, Issue 13, 2004 (2024)
Fig. 1. Schematic diagram of Wolter-I
Fig. 2. Measurement device for surface profile of mandrel（Probe 1 measures the surface profile of the mandrel and probe 2 measures the surface profile of the reference mirror）
Fig. 3. Mandrel test process
Fig. 4. Decomposition of measurement errors
Fig. 5. Schematic diagram of spectral confocal probe
Fig. 6. Schematic diagram of assembly error correction
Fig. 7. Measurement system of mandrel
Fig. 8. Variation of repeatability with sampling frequency
Fig. 9. Surface shape and repeatability of reference surface
Fig. 10. Mandrel roundness fitting
Fig. 11. Taper error correction results
Fig. 12. Temperature and humidity monitoring data
Fig. 13. Result of environmental error correction experiment
Fig. 14. Comparison of reference surface corrections
Fig. 15. CGH measurement experiment
Fig. 16. Verification experiment of optical probe and CGH
Fig. 17. Two-dimensional surfaces
|
Table 1. Parameters of high-precision machine tools
|
Table 2. Parameters of spectral confocal probe
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20