Jinhua ZHENG, Qingyun LIU, Zhixiong LI. Effect of negative bias voltage on properties of hydrogenated diamond-like carbon films[J]. Optics and Precision Engineering, 2022, 30(4): 411
- Optics and Precision Engineering
- Vol. 30, Issue 4, 411 (2022)
Fig. 1. Schematic diagram of the film deposition system
Fig. 2. AFM figures of the sample surface under different bias voltages
Fig. 3. SEM photographs of the sample surface and cross-sections under different bias voltages
Fig. 4. Peak fitting of Raman specturm
Fig. 5. Raman fitting results under different bias voltages
Fig. 6. Residual compressive stress of films
Fig. 7. Surface morphology of the top DLC film prepared with the bias voltage of - 1 200 V
Fig. 8. Binding force on 45 steel substrate under different bias voltages
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Table 1. Deposition process parameters of DLC layers
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Table 2. Film thickness of each layer and total film thickness
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Table 3. Raman peaks and their origination of 1000-1800 cm-1
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Table 4. Raman fitting data
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