• Acta Photonica Sinica
  • Vol. 39, Issue 5, 792 (2010)
ZHENG Yu1、2, WANG Jing-quan1, LI Ming1, NIU Xiao-yun1, and DU Jing-lei1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    ZHENG Yu, WANG Jing-quan, LI Ming, NIU Xiao-yun, DU Jing-lei. Resist Exposure Developing Simulation Study of SPPs Lithography[J]. Acta Photonica Sinica, 2010, 39(5): 792 Copy Citation Text show less
    References

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    [2] ZHAO Wei-liu,QI Huo-wei, ZHANG Xiang.Surface plasmon interference nanolithography[J]. Nano Letters,2005,5(5):957-961.

    [3] LEI Ming,YAO Bao-li.Theoretical and experimental studies on multi-beam interference by using pyramid lens[J].Acta Optica Sinica,2006,26(5):757-762.

    [4] YANG Yi,ZHANG Su-huai,WANG Guo-ping.Fabrication of two-dimensional metallodielectric quasicrystals by single-beam holography[J].Appl Phys Lett,2006,88:251104.

    [5] ZHANG Jin,FENG Bo-ru,GUO Yong-kang,et al.Laser interference photolithography for fabricating periodic patterns in large area[J].Opto-Elec Engineering,2001,28(6):20-23.

    [6] LUO Xian-gang,ISHIHARA T. Surface plasmon resonant interference nanolithography technique[J]. Applied Physics Letters,2004,84(23):4780-4782.

    [7] GUO X,DU J,GUO Y.Large-area surface-plasmon polariton interference[J].Opt Lett,2006,17(31):2613-2615.

    [8] ZHAO Hua-wei,HUANG Xu-guang,SU Hui.A novel Y- branch waveguide based on surface plasmon polaritions[J].Acta Optica Sinica,2007,27(9):1649-1652.

    [9] FANG Liang,DU Jing-lei.Study on SPPs interference lithography based on ATR coupling[D].Chengdu:Sichuan University,2008,5-46.

    [10] FANG N,ZHANG X. Imaging properties of a metamaterial superlens[J]. Applied Physics Letters,2003,82(2):161-163.

    [11] XIAO Xiao,DU jing-lei.Study on imaging characteristics of thick photoresists in lithography[D].Chengdu:Sichuan University,2003:9-42.

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    [2] Yang Zheng, Zhang Zhiyou, Li Shuhong, Gao Fuhua, Du Jinglei. Exposure Developing Simulation Study of Single-Mode-Resonance Interference Lithography[J]. Acta Optica Sinica, 2013, 33(5): 505001

    ZHENG Yu, WANG Jing-quan, LI Ming, NIU Xiao-yun, DU Jing-lei. Resist Exposure Developing Simulation Study of SPPs Lithography[J]. Acta Photonica Sinica, 2010, 39(5): 792
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