An improved test and analyze method for microbolometer thermal performances

LIU Zi-Ji; LV Jian; ZHENG Xing; JIANG Ya-Dong; WANG Tao

Journals >Journal of Infrared and Millimeter Waves >Volume 31 >Issue 2 >Page 183 > Article

Journal of Infrared and Millimeter Waves
Vol. 31, Issue 2, 183 (2012)

An improved test and analyze method for microbolometer thermal performances

LIU Zi-Ji^*, LV Jian, ZHENG Xing, JIANG Ya-Dong, and WANG Tao

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[in Chinese]

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DOI: Cite this Article

LIU Zi-Ji, LV Jian, ZHENG Xing, JIANG Ya-Dong, WANG Tao. An improved test and analyze method for microbolometer thermal performances[J]. Journal of Infrared and Millimeter Waves, 2012, 31(2): 183 Copy Citation Text

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Abstract

An improved test method was introduced. Compared with the traditional one, it could be more precision and impersonal. Nevertheless it is easy to implement and anti-influence of fabricated process. Through the test process with the microbolometers fabricated, this test method is reliable and precision.

Keywords

microbolometer test thermal capacitance thermal conductance

LIU Zi-Ji, LV Jian, ZHENG Xing, JIANG Ya-Dong, WANG Tao. An improved test and analyze method for microbolometer thermal performances[J]. Journal of Infrared and Millimeter Waves, 2012, 31(2): 183

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