Mengtao XIE, Junbiao LIU, Pengfei WANG, Lixin ZHANG, Li HAN. Research on resist-layer thickness by spin-coating on curved substrate[J]. Optics and Precision Engineering, 2022, 30(1): 71
- Optics and Precision Engineering
- Vol. 30, Issue 1, 71 (2022)
Fig. 1. Force diagram of non-Newtonian fluid on curved substrate
Fig. 2. Relationship between shear rate and stress of 950 K PMMA C% resist-coating
Fig. 3. Contrast of film thickness obtained at rotating speed of 2 000 r/min
Fig. 4. Contrast of film thickness obtained at rotating speed of 3 000 r/min
Fig. 5. Theoretical curve of center thickness at different rotating speeds
Fig. 6. Thickness of reference given by kayakuAM［18］
Fig. 7. Variation of film thickness with vector radius
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