The substrate and layer materials used for the antireflection coatings at 193 nm range are calculated and analyzed, and the deposition technique and parameters are carefully chosen and optimized. Based on these analyses the antireflection coatings for 193 nm light at large incident angle are designed, fabricated and tested. The results show that after coating, the residual reflection is lower than 1% and the single transmission of the coating is higher than 96% when the incident angle is 68°~72°. The single round trip energy loss of the linewidth narrowing module is calculated before coating and after coating, which confirms the necessity of this antireflection coating.