The 2-D Grating&#39;s Spectrum Analysis and Application in Precise Measurement

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Photonica Sinica >Volume 36 >Issue 4 >Page 726 > Article

Acta Photonica Sinica
Vol. 36, Issue 4, 726 (2007)

The 2-D Grating's Spectrum Analysis and Application in Precise Measurement

[in Chinese]¹, [in Chinese]¹, and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. The 2-D Grating's Spectrum Analysis and Application in Precise Measurement[J]. Acta Photonica Sinica, 2007, 36(4): 726 Copy Citation Text

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References

[1] SPIES A.Linear and angular encoders for the high resolution range[C].Proc of 9th IPES.Braunschweig,Germany,1997:54-57.

[2] THIEL J,SPANNER E.Interferential linear with 270 mm measuring length for nanometrology[OL],http://www.automet.com/Heidenhain/techdata/thiel.html.

[3] TEIMEL A.Technology and applications of grating intererometer in high-precision measurement[J].Precision Engineering,1992,14(3):147-154.

[5] TETSUO Ohara.Scanning Probe Position Encoder (SPPE)-a new approach for a high precision and high speed position measurement system[OL].http://www.nanowave.com/SPIE paper web.pdf,2001.

[6] WANG Xuanze,DONG Xiaohua,GUO Jun.Two-dimensional displacement sensing using a cross diffraction grating scheme[J].Journal of Optics A:Pure and Applied Optics,2004,6(1):106-111.

[in Chinese], [in Chinese], [in Chinese]. The 2-D Grating's Spectrum Analysis and Application in Precise Measurement[J]. Acta Photonica Sinica, 2007, 36(4): 726

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