• Semiconductor Optoelectronics
  • Vol. 43, Issue 5, 854 (2022)
GUO Anran, LEI Renfang, HUANG Jian, DENG Guangping, MA Huaping, HUANG Lieyun, GU Shunhu, and GUO Pei
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  • [in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2022052802 Cite this Article
    GUO Anran, LEI Renfang, HUANG Jian, DENG Guangping, MA Huaping, HUANG Lieyun, GU Shunhu, GUO Pei. Fabrication of Silicon Linear-mode APD Focal Plane Arrays[J]. Semiconductor Optoelectronics, 2022, 43(5): 854 Copy Citation Text show less

    Abstract

    Aiming at the requirements of avalanche photodiode (APD) focal plane in 3D-lidar imaging, a 2×128 silicon linear-mode APD focal plane module was prepared. It consisted of silicon based APD focal plane array, readout circuit and refrigeration package shell. APD pixels adopted the reach-through structure, achieved a high fill factor by large size micro-lens arrays, realized crosstalk suppression through isolation ring doping, and achieved breakdown voltage and response current uniformity through optimization of the ion implantation process. A low noise transimpedance amplifier circuit with large bandwidth and a high precision timing circuit were designed to realize narrow pulse width and high sensitivity detection. Airtight encapsulation was performed to achieve integrated APD focal plane refrigeration encapsulation with a refrigeration temperature difference over 40K. The test results show that the detection threshold optical power of the focal plane can reach 3.24nW, and the response non-uniformity is 3.8%, the crosstalk is 0.14%, and the minimum time resolution can reach 0.25ns, realizing the simultaneous output function of intensity information and time information.
    GUO Anran, LEI Renfang, HUANG Jian, DENG Guangping, MA Huaping, HUANG Lieyun, GU Shunhu, GUO Pei. Fabrication of Silicon Linear-mode APD Focal Plane Arrays[J]. Semiconductor Optoelectronics, 2022, 43(5): 854
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