QIU Hongyu, WANG Xinyi, DUAN Zhang, QIU Peng, LIU Heng, ZHU Xiaoli, TIAN Feng, WEI Huiyun, ZHENG Xinhe. Plasma-Enhanced Atomic Layer Deposition of GaN Thin Films on GaAs Substrate[J]. Semiconductor Optoelectronics, 2023, 44(4): 573
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