Linghao Zhang, Kegui Xia, Xinghua Ma, Linglin Zhu, Aijun Zeng, Huijie Huang, Avakaw Sergey. Detection Method for 248 nm Depolarizer Independent of Laser Intensity Fluctuation[J]. Chinese Journal of Lasers, 2022, 49(4): 0404003
- Chinese Journal of Lasers
- Vol. 49, Issue 4, 0404003 (2022)
Fig. 1. Structure diagram of depolarizer
Fig. 2. Schematic of 248 nm depolarizer detection method
Fig. 3. 10000-repeated measurement results for output intensity of excimer KrF laser
Fig. 4. DOP versus vibration direction angle and beam size of incident light. (a) DOP versus vibration direction angle of incident light; (b) DOP versus beam diameter
Fig. 5. DOP versus extinction ratio of polarizer and analyser. (a) DOP versus polarizer extinction ratio; (b) absolute error between the measured and true DOP values versus analyser extinction ratio under different true DOP values
Fig. 6. Absolute error curves of measured and true DOP values. (a) Absolute error versus rotation precision of analyser under different true values; (b) absolute error versus true DOP value under different probe accuracy values
Fig. 7. Experimental equipment for 248 nm depolarizer detection
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Table 1. DOP measurement results obtained by wave-plate verification test
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Table 2. DOP measurement results of depolarizer in repeatability test
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Table 3. DOP measurement results of depolarizer in reproducibility test
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