• Acta Photonica Sinica
  • Vol. 31, Issue 10, 1216 (2002)
[in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. THE CHARACTERISATION OF DC REACTIVE MAGNETRON SPUTTERED ZNO FILMS[J]. Acta Photonica Sinica, 2002, 31(10): 1216 Copy Citation Text show less
    References

    [1] Bagnall D M,Chen Y F,Zju Z.Optically pumped lasing of ZnO at room temperature.Appl Phys Lett,1997,70(17),28:2230~2232

    [2] Service R F.Will UV lasers beat the blues Science.1997,276(9):895~899

    [3] Hu,Gordon R G.Textured aluminum-doped zinc oxide thin films from atmospheric pressure chemical-vapor deposition.J Appl Phys,1992,71(2):880~890

    [4] Shiosaki T,Ohnishi S,Kawabata A.Optical properties of single-crystalline ZnO film smoothly chemical-vapor deposited on intermediately sputtered thin ZnO film on sapplire.J Appl Phys,1979,50(5):3113~3117

    [5] Suzuki A,Matsushita T,Sakamoto Y.Tranaparent conducting Al-doped ZnO thin films prepared by poulsed laser deposition.Jpn J Appl Phys (A),1996,35(1):L56~L59

    [6] Wenas W W,Yamada A,Konagai M,et al.Metalorganic chemical vapor deposition of ZnO using D2O as oxidant.Jpn J Appl Phys(A),1994,33(3):L283~L285

    [7] Chen Y F,Bagnall D M,Koh H J,et al.Plasma assisted molecular beam epitaxy of ZnO on c-plane sapphire:Growth and characterization.J Appl Phys.1998,84(7):3912~3917

    [9] Hachigo A,Nakahal H,Higaki K,et al.Heteroepitaxial growth of ZnO films on diamond(111) plane by magnetron sputtering.Appl Phys Lett,1994,65(20):2556~2558

    [10] Wacogne B,Roe M D,Pattinson T J,et al.Effective piezoelectric activity of zinc oxide films grown by radio-frequency plana magnetron sputtering.Appl Phys Lett,1995,67(12):1674~1676

    [11] Doh S J,Park S I,Cho T S,et al.Effects of grid bias on ZnO/α-Al2O3(0001) heteroepitaxy.J Vac Sci Technol(A),Sep/Opt 1999,17(5):3003~3007

    [12] Bachari E M,Baud G,BenAmor S,et al.Structural and optical properties of sputtered ZnO films.Thin Solid Films,1999,348(1-2):165~172

    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. THE CHARACTERISATION OF DC REACTIVE MAGNETRON SPUTTERED ZNO FILMS[J]. Acta Photonica Sinica, 2002, 31(10): 1216
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